APA
Ruska W. S., . (1987). Microelectronic processing : an introduction to the manufacture of integrated circuits. New York, N.Y: McGraw-Hill.
Chicago
Ruska W Scot, . 1987. Microelectronic processing : an introduction to the manufacture of integrated circuits. New York, N.Y: McGraw-Hill.
Harvard
Ruska W. S., . (1987). Microelectronic processing : an introduction to the manufacture of integrated circuits. New York, N.Y: McGraw-Hill.
MLA
Ruska W Scot, . Microelectronic processing : an introduction to the manufacture of integrated circuits. New York, N.Y: McGraw-Hill. 1987.