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Mems & microsystems : design and manufacture / Tai-Ran Hsu

By: Material type: TextTextPublication details: Boston, Mass. : McGraw-Hill, 2002Edition: International edDescription: 436 p. : illISBN:
  • 0071204768
Other title:
  • Mems and microsystems : design and manufacture
Subject(s): LOC classification:
  • TK7874 H78M 2002
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Item type Home library Collection Shelving location Call number Status Barcode
Books Books BU Library and Learning Space Books Book Shelves TK7874 H78M 2002 (Browse shelf(Opens below)) Available 200512030037
Total holds: 0

Includes bibliographical references and index

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